东京电子 TEL TSP - 30555SSS 干式蚀刻机用途：主要应用于半导体制造领域，通过蚀刻工艺精准去除晶圆表面特定材料，在芯片制造、集成电路生产等环节起着关键作用，能够满足逻辑芯片、存储芯片等不同产品的蚀刻需求。性能：设备重 61.3kg，电源规格等暂未明确，但作为东京电子产品，推测采用先进等离子蚀刻技术，配备高精度气体流量控制系统和等离子体发生装置，能精准调控蚀刻速率与选择性，适用于多种半导体材料。独特的腔室设计可减少蚀刻残留物，提升蚀刻均匀性，保障生产效率，可处理常见尺寸的晶圆 。

Product Name: Tokyo Electron TEL TSP - 30555SSS Dry EtcherPurpose: It is mainly applied in the semiconductor manufacturing field. Through the etching process, it accurately removes specific materials on the wafer surface, playing a crucial role in chip manufacturing, integrated circuit production and other processes, and can meet the etching requirements of different products such as logic chips and memory chips.Performance: The equipment weighs 61.3kg. The power supply specifications are not yet clear. However, as a product of Tokyo Electron, it is presumed to adopt advanced plasma etching technology and be equipped with a high - precision gas flow control system and a plasma generation device. It can precisely regulate the etching rate and selectivity and is suitable for a variety of semiconductor materials. The unique chamber design can reduce etching residues, improve etching uniformity, ensure production efficiency, and can process wafers of common sizes.