东京电子 TEL TSP - 30555SS 蚀刻机用途:用于半导体制造,能精准蚀刻晶圆表面材料,助力芯片制造与集成电路生产。在逻辑芯片、存储芯片等产品制造流程中,通过去除特定材料实现电路图案转移,是半导体生产的关键设备 。性能:虽具体技术参数暂未明确,但作为东京电子的蚀刻机,推测采用先进蚀刻技术。可能配备精确的气体流量控制系统,以精准调控蚀刻过程。设备的腔室设计或有助于减少蚀刻残留物,提升蚀刻均匀性。能够处理常见尺寸的晶圆,满足半导体生产对不同规格晶圆的加工需求 。
Product Name: Tokyo Electron TEL TSP - 30555SS EtcherPurpose: It is used in semiconductor manufacturing. It can accurately etch the materials on the wafer surface, facilitating chip manufacturing and integrated circuit production. In the manufacturing processes of products such as logic chips and memory chips, it realizes the transfer of circuit patterns by removing specific materials and is a key device in semiconductor production.Performance: Although the specific technical parameters are not clear, as an etcher of Tokyo Electron, it is presumed to adopt advanced etching technology. It may be equipped with an accurate gas flow control system to precisely regulate the etching process. The chamber design of the equipment may help reduce etching residues and improve etching uniformity. It can process wafers of common sizes to meet the processing requirements of different - sized wafers in semiconductor production.