东京精密 TOKYO SEIMITSU UF3000EX - D用途：为 28 纳米晶圆探针系统，应用于半导体芯片测试环节。可对 8 英寸、12 英寸晶圆开展测试，通过 OCR 标识自动识别、程序控制、自动机械走步等功能，进行芯片电学性能检测。适用于从消费级芯片到高端处理器等各类芯片的测试场景。性能：综合精度达 2um ，适用 8 英寸、12 英寸晶圆。温度测试范围为 - 50℃～150℃ ，可满足不同温度条件下的测试需求。X/Y 轴最大速度为 500mm/sec ，能快速移动进行高效测试。采用先进的纳米级定位技术与高精度探针卡接口，X/Y 轴定位精度达 ±0.5μm，Z 轴重复定位精度 ±0.1μm 。配备高灵敏度测量系统，可检测低至 pA 级的微弱电流与 μV 级电压信号 。

Product Name: TOKYO SEIMITSU UF3000EX - D by Tokyo SeimitsuPurpose: It is a 28 - nanometer wafer prober system, applied to the semiconductor chip testing process. It can test 8 - inch and 12 - inch wafers. Through functions such as OCR mark automatic recognition, program control, and automatic mechanical stepping, it conducts chip electrical performance testing. It is suitable for testing scenarios of various chips from consumer - grade chips to high - end processors.Performance: The comprehensive accuracy reaches 2um, and it is applicable to 8 - inch and 12 - inch wafers. The temperature test range is -50°C to 150°C, which can meet the testing requirements under different temperature conditions. The maximum speed of the X/Y axis is 500mm/sec, which can move quickly for efficient testing. It adopts advanced nanometer - level positioning technology and high - precision probe card interface, with the X/Y axis positioning accuracy reaching ±0.5μm and the Z - axis repeat positioning accuracy reaching ±0.1μm. It is equipped with a high - sensitivity measurement system that can detect weak current as low as pA level and voltage signals at μV level.