东京精密 TOKYO SEIMITSU UF200SA用途：这是一款桌面式晶圆探针台设备，主要用于精密器件特性分析、老化测试、可靠性测试以及测试失效分析等应用场景。可实现芯片电学性能检测，让测试探针精准接触晶圆上芯片引脚。性能：采用基于 CCD 相机的图像采集单元，图像分辨率和清晰度出色，即使在高温环境下也能低噪运行，能提供 1.5μm 的高分辨率图像 。X - Y - Z 工作平台为电动控制，确保绝对位置精度，搭配可调节真空吸盘，便于准确装载样品。具备现场校准功能以保证测量简便、准确，还设有基于染料的非易失性标记用于可追溯性。设备集成先进自动化和智能缺陷学习技术，探测后能自动精准定位测试。支持 8 英寸（200mm）晶圆 ，运行环境要求气压超 0.45MPa、真空度超 - 53kPa、电压 208V AC（单相）、频率 50/60Hz 。

Product Name: TOKYO SEIMITSU UF200SA by Tokyo SeimitsuPurpose: This is a tabletop wafer prober equipment mainly used for precision device characterization, burn - in testing, reliability testing, and test failure analysis applications. It can detect the electrical properties of chips by accurately contacting the test probes with the chip pins on the wafer.Performance: It adopts a CCD camera - based image acquisition unit, which has excellent image resolution and clarity. It can operate with low noise even in high - temperature environments and can provide a high - resolution image of 1.5μm. The X - Y - Z work stage is motor - controlled to ensure absolute positional accuracy, and it is equipped with an adjustable vacuum chuck for easy and accurate sample loading. It has an in - field calibration function to ensure easy and accurate measurements and a dye - based non - volatile mark for traceability. The equipment integrates advanced automation and intelligent defect learning technology to automatically and accurately position the test after probing. It supports 8 - inch (200mm) wafers. The operating environment requires air pressure over 0.45MPa, vacuum degree over - 53kPa, voltage of 208V AC (single - phase), and frequency of 50/60Hz.