TSK UF200 探针台用途:适用于 5 至 8 英寸晶圆测试,主要用于 8 英寸全自动集成电路测试场景。可用于芯片研发阶段的电学特性测试,也适用于量产阶段的质量检测,如对 MEMS 传感器、功率器件等进行功能检测 。性能:作为一款高精度测试设备,采用 OTS 光学自动对准技术,移动性能优异,操作方便灵活。设备综合精度可达 2um。具备 inkless map、multisite 测试功能,且能进行 150 度高温测试。能有效提升生产效率,减少大量测试成本,增进系统吞吐量,降低生产成本 。
英文Product Name: TSK UF200 Probe StationPurpose: Suitable for 5 to 8-inch wafer testing, mainly used in 8-inch fully automatic integrated circuit testing scenarios. It can be used for electrical property testing in the chip R & D stage and quality inspection in the mass production stage, such as functional testing of MEMS sensors and power devices.Performance: As a high-precision testing device, it adopts OTS optical automatic alignment technology, with excellent mobility and convenient and flexible operation. The comprehensive accuracy of the device can reach 2um. It has functions such as inkless map and multisite testing, and can conduct 150-degree high-temperature testing. It can effectively improve production efficiency, reduce a large number of testing costs, improve system throughput, and reduce production costs.