阿斯麦 ASML 2500/40用途：是一款 i-line 光刻步进机，用于 3 英寸、4 英寸、5 英寸和 6 英寸晶圆的集成电路生产。它通过 365nm 的 i-line 光线，将掩模版上的电路图形转移到晶圆表面的光刻胶上，助力芯片制造流程 。性能：该设备工作分辨率为 0.7 微米，采用数值孔径 0.40 的 i-line 镜头，像场直径 21.1mm 。针对 i-line 工艺下 0.7 微米以下的生产分辨率进行了优化，可较好地满足非关键成像光刻需求 。

Product Name: ASML 2500/40Purpose: It is an i-line lithography stepper used for the production of integrated circuits on 3-inch, 4-inch, 5-inch, and 6-inch wafers. Through 365nm i-line light, it transfers the circuit patterns on the photomask to the photoresist on the wafer surface, facilitating the chip manufacturing process.Performance: The device has a working resolution of 0.7 microns, uses an i-line lens with a numerical aperture of 0.40, and has an image field diameter of 21.1mm. It is optimized for production resolutions below 0.7 microns in i-line processes and can better meet the lithography requirements for non-critical imaging.