阿斯麦 ASML Power box用途：ASML Power box 是阿斯麦公司为半导体制造设备，尤其是光刻机配套的电源装置。其主要用途是为光刻机内的各类精密组件，如光源系统、光学系统、晶圆运动控制机构等提供稳定、精准的电力供应，保障设备各功能模块正常运作，进而确保芯片光刻制程的准确性与稳定性 。性能：不同型号的 Power box 性能有差异。例如部分型号可提供多种电压输出，像 - 48V/33A，输入电压为 230V，频率 50/60Hz，电流 3.2A；还有的能输出 15V 电压，输入电压支持 115V 或 230V 。设备具备良好的稳定性，可有效降低电力波动对光刻机精密操作的影响，保障光源稳定发光、光学系统精确对焦以及晶圆平稳移动，为实现高分辨率光刻、高套刻精度等关键性能指标奠定电力基础 。

Product Name: ASML Power boxPurpose: The ASML Power box is a power supply device provided by ASML for semiconductor manufacturing equipment, especially lithography machines. Its main purpose is to provide stable and precise power supply for various precision components in the lithography machine, such as the light source system, optical system, and wafer motion control mechanism, ensuring the normal operation of each functional module of the equipment and thus guaranteeing the accuracy and stability of the chip lithography process.Performance: The performance of different models of Power box varies. For example, some models can provide multiple voltage outputs, such as -48V/33A, with an input voltage of 230V, a frequency of 50/60Hz, and a current of 3.2A; others can output 15V voltage and support an input voltage of 115V or 230V. The equipment has good stability, which can effectively reduce the impact of power fluctuations on the precise operation of the lithography machine, ensuring stable light emission from the light source, accurate focusing of the optical system, and smooth movement of the wafer, laying a power foundation for achieving key performance indicators such as high - resolution lithography and high overlay accuracy.