阿斯麦 ASML Lot of frames（一批框架）用途：ASML Lot of frames 指一批用于光刻机关键组件的框架。这些框架主要用于精准固定和支撑光刻机内部的光学镜片、晶圆台等重要部件，确保各组件在工作过程中保持稳定的相对位置关系，为芯片光刻制程提供稳定的物理结构基础，助力实现高精度的电路图形转移，从而保障芯片制造的准确性和稳定性 。性能：不同类型框架性能有别。例如用于极紫外（EUV）光刻机的框架，需满足极高精度要求。其采用特殊铝合金材质，每块重近 20 吨，经 1300 多小时加工后减至约 3 吨，能承受复杂环境应力，保障镜片等部件的高精度定位 。框架尺寸较大，长宽高均达数米，以适配大型光学系统。在加工精度上，可确保内部组件位置偏差控制在极小范围内，如镜片安装框架能保证镜片间的平行度和垂直度精度达到亚微米级，为实现高分辨率光刻、高套刻精度等关键性能指标提供可靠支撑 。

Product Name: ASML Lot of frames (a batch of frames)Purpose: ASML Lot of frames refers to a batch of frames used for key components of lithography machines. These frames are mainly used to accurately fix and support important components such as optical lenses and wafer stages inside the lithography machine, ensuring that each component maintains a stable relative position during operation. They provide a stable physical structure basis for the chip lithography process, helping to achieve high - precision circuit pattern transfer and thus ensuring the accuracy and stability of chip manufacturing.Performance: Different types of frames have different performances. For example, the frames used in extreme ultraviolet (EUV) lithography machines need to meet extremely high precision requirements. They are made of special aluminum alloy materials, each weighing nearly 20 tons and being reduced to about 3 tons after more than 1300 hours of processing. They can withstand complex environmental stresses and ensure the high - precision positioning of components such as lenses. The frames are relatively large in size, with a length, width, and height of several meters to adapt to large - scale optical systems. In terms of processing accuracy, the position deviation of internal components can be controlled within a very small range. For example, the lens - mounting frame can ensure that the parallelism and perpendicularity accuracy between lenses reach the sub - micron level, providing a reliable support for achieving key performance indicators such as high - resolution lithography and high overlay accuracy.