日立 HITACHI S-4100用途：适用于材料科学、生命科学、半导体等多领域。可用于观察材料微观结构，像金属、陶瓷等材料内部组织；研究生物样品超微形态，例如细胞、微生物的精细结构；分析半导体芯片细微构造，助力芯片制造工艺优化；还能对材料表面微区成分进行定性和定量分析 。技术原理：冷阴极场发射电子枪发射电子束，电子束经加速电压加速后，由磁透镜聚焦至样品表面，并在偏转线圈作用下进行光栅扫描。电子与样品相互作用产生二次电子、背散射电子等信号，探测器收集这些信号并转化为电信号，经放大处理成像。性能：分辨率方面，30kV 时为 2.0nm；放大倍率范围是 20 - 300,000 倍；加速电压范围 0.5 - 30kV；样品台有两种类型，Type I 为 5 轴手动，X/Y 向移动 25mm，Z 向移动 5 - 30mm，倾斜 - 5° 至 + 45°，旋转 360°（连续），最大样品直径 100mm；Type II 同样 5 轴手动，X 向移动 100mm，Y 向移动 50mm，Z 向移动 5 - 35mm，倾斜 - 5° 至 + 60°，旋转 360°（连续），最大样品直径 150mm 。Product Name: Hitachi HITACHI S-4100Purpose: It is suitable for multiple fields such as materials science, life sciences, and semiconductors. It can be used to observe the microstructure of materials, such as the internal structure of metals and ceramics; study the ultrastructure of biological samples, such as the fine structure of cells and microorganisms; analyze the fine structure of semiconductor chips, contributing to the optimization of chip manufacturing processes; and perform qualitative and quantitative analysis of the micro-area composition on the material surface.Technical Principle: The cold cathode field emission electron gun emits an electron beam. The electron beam is accelerated by the acceleration voltage, focused on the sample surface by the magnetic lens, and undergoes raster scanning under the action of the deflection coil. The electrons interact with the sample to generate signals such as secondary electrons and backscattered electrons. The detector collects these signals and converts them into electrical signals, which are then amplified and processed for imaging.Performance: In terms of resolution, it is 2.0nm at 30kV. The magnification range is 20 - 300,000 times. The acceleration voltage ranges from 0.5 - 30kV. There are two types of sample stages. Type I is 5 - axis manual, with X/Y movement of 25mm, Z movement of 5 - 30mm, tilt of - 5° to + 45°, rotation of 360° (continuous), and the maximum sample diameter is 100mm. Type II is also 5 - axis manual, with X movement of 100mm, Y movement of 50mm, Z movement of 5 - 35mm, tilt of - 5° to + 60°, rotation of 360° (continuous), and the maximum sample diameter is 150mm.