日立 HITACHI I900SRT 晶圆检测传输机器人。用途：主要应用于半导体制造领域，负责晶圆在检测设备间的精准传输，确保检测流程的高效、稳定运行，提升整体生产效率。技术原理：通过精密的电机驱动系统与先进的运动控制算法，能够精确规划和执行传输路径。利用传感器实时监测自身位置和晶圆状态，保障传输过程的准确性与安全性。性能：具备快速的传输速度，可在短时间内完成晶圆的移送，有效缩短检测周期。重复定位精度极高，偏差控制在极小范围内，例如可达 ±0.05mm，确保晶圆在传输过程中的位置精准，为后续高精度检测提供可靠保障。Product Name：Hitachi HITACHI I900SRT Wafer Inspection Transfer Robot.Purpose：It is mainly applied in the semiconductor manufacturing field. It is responsible for the precise transfer of wafers between inspection equipment, ensuring the efficient and stable operation of the inspection process and improving the overall production efficiency.Technical Principle：It can accurately plan and execute the transfer path through a precise motor drive system and advanced motion control algorithms. Sensors are used to monitor its own position and the wafer status in real time to ensure the accuracy and safety of the transfer process.Performance：It has a fast transfer speed and can complete the transfer of wafers in a short time, effectively shortening the inspection cycle. The repeat positioning accuracy is extremely high, and the deviation is controlled within a very small range. For example, it can reach ±0.05mm, ensuring the precise position of the wafer during the transfer process and providing a reliable guarantee for subsequent high - precision inspections.