日立 HITACHI S-5200 Plus用途：广泛应用于材料科学、纳米技术、生命科学、地质学及工业质量控制等领域，可用于观察材料微观结构、纳米材料形貌、生物样品表面结构、地质样品微观成分，以及检测工业产品表面缺陷等。技术原理：利用场发射电子枪发射电子束，电子束与样品相互作用产生二次电子、背散射电子等信号，通过探测器收集这些信号并转化为图像，以此呈现样品的微观特征。性能：分辨率方面，30kV 时可达 0.5nm，1kV 时为 1.8nm，2kV 时为 1.2nm；放大倍率为 20 - 2,000,000 倍；加速电压能实现 0.01kV 超低着陆电压成像；样品台为 5 轴优中心马达驱动，X、Y 向行程 110mm，Z 向行程 1.5 - 40mm，旋转角度 R 为 360°，倾斜角度 T 为 - 5° - 70°。具备多种信号检测模式，污染率低，机械稳定性高，允许地面振动 10μm（P - P）、5Hz 。Product Name: Hitachi HITACHI S-5200 PlusPurpose: It is widely used in fields such as materials science, nanotechnology, life sciences, geology and industrial quality control. It can be used to observe the microstructure of materials, the morphology of nanomaterials, the surface structure of biological samples, the microscopic composition of geological samples, and detect surface defects of industrial products.Technical Principle: It uses a field emission electron gun to emit an electron beam. The electron beam interacts with the sample to generate signals such as secondary electrons and backscattered electrons. These signals are collected by detectors and converted into images to present the microscopic characteristics of the sample.Performance: In terms of resolution, it can reach 0.5nm at 30kV, 1.8nm at 1kV and 1.2nm at 2kV. The magnification is 20 - 2,000,000 times. The acceleration voltage can achieve ultra - low landing voltage imaging of 0.01kV. The sample stage is driven by a 5 - axis centering motor, with X and Y travel of 110mm, Z travel of 1.5 - 40mm, rotation angle R of 360° and tilt angle T of - 5° - 70°. It has a variety of signal detection modes, low contamination rate and high mechanical stability, allowing floor vibrations of 10μm (P - P) at 5Hz.