日立 HITACHI HF-2000 冷场发射枪电子显微镜。用途：适用于金属材料、金属基复合材料、陶瓷材料等，可对其原子尺度结构和成分展开研究。技术原理：在超高真空环境下，极尖的 W（310）单晶灯丝受外加强电场作用，电子逸出表面的势垒降低变窄，产生隧道效应，室温下单位立体角内产生大量电子且能量漫散小。电子经阳极加速、聚光镜系统会聚成细高能电子束照射薄膜样品，利用弹性与非弹性散射电子产生的信号分析微观结构。性能：点分辨率达 0.24nm，线分辨率为 0.102nm，信息分辨率是 0.18nm。放大倍数方面，LOW MAG 模式为 50 至 200 倍，ZOOM 模式是 2000 至 1500000 倍，SA 模式为 5000 至 300000 倍。相机常数范围 0.05m 至 1.6m，电子枪为冷场发射枪，最小束斑尺寸 1nm 。样品室采用侧插式样品台，双倾台 X 向 ±30°、Y 向 ±15°，单倾台 X 向 ±30°（EDS 观察），样品平移范围 X、Y 向 ±5mm，Z 向 ±0.3mm，样品尺寸 φ3mm（TEM 观察） 。Product Name：Hitachi HITACHI HF-2000 Cold Field Emission Gun TEM.Purpose：It is applicable to metallic materials, metal matrix composites, ceramic materials, etc., and can conduct research on their atomic - scale structures and compositions.Technical Principle：Under ultra - high vacuum conditions, the extremely sharp W(310) single - crystal filament is affected by an external strong electric field. The potential barrier for electrons to escape from the surface is reduced and narrowed, resulting in the tunnel effect. At room temperature, a large number of electrons are generated within a unit solid angle with small energy dispersion. The electrons are accelerated by the anode and converged into a thin high - energy electron beam by the condenser lens system to irradiate the thin - film sample. Signals generated by elastic and inelastic scattered electrons are used to analyze the microstructure.Performance：The point resolution reaches 0.24nm, the line resolution is 0.102nm, and the information resolution is 0.18nm. In terms of magnification, the LOW MAG mode ranges from 50× to 200×, the ZOOM mode ranges from 2000× to 1,500,000×, and the SA mode ranges from 5000× to 300,000×. The camera constant ranges from 0.05m to 1.6m. The electron gun is a cold field emission gun, and the minimum beam spot size is 1nm. The sample chamber adopts a side - inserted sample stage. The double - tilt stage has an inclination of ±30° in the X - direction and ±15° in the Y - direction, and the single - tilt stage has an inclination of ±30° in the X - direction (for EDS observation). The sample translation range is ±5mm in the X and Y directions and ±0.3mm in the Z direction. The sample size is φ3mm (for TEM observation).