日立 HITACHI HD-2300 超薄膜评估装置。用途：主要用于纳米技术领域，可对半导体器件、MEMS 开发及新型材料中的亚纳米级结构进行分析，如观察金单晶薄膜等样品的微观结构。技术原理：通过电子枪发射电子束，经加速后穿透超薄膜样品，利用电子与样品相互作用产生的信号成像。设备具备自动轴调整和图像调整功能，确保成像的准确性和稳定性。性能：加速电压为 200kV 。能实现快速样品交换（2 分钟内）和高压施加（从待机到 200kV 仅需 3 分钟）。可提供高分辨率的扫描透射电子显微镜（STEM）像和扫描电镜（SEM）像，在相位对比像中能保证 0.204nm 分辨率（倍率 ×4,000,000，样品为金单晶薄膜）。支持纳米区域电子衍射，并可与 STEM 像同时显示 。搭载高灵敏度 EDX 分析功能，X 射线取出角度 25° 以上，立体角 0.3 sr 以上 。还可搭载高速、高灵敏度的自家制 EELS 成像装置，实现轻元素及过渡金属的实时成像。Product Name：Hitachi HITACHI HD - 2300 Ultra - thin Film Evaluation Device.Purpose：It is mainly used in the field of nanotechnology and can analyze sub - nanometer - scale structures in semiconductor devices, MEMS development, and new materials, such as observing the microstructure of samples like gold single - crystal thin films.Technical Principle：An electron gun emits an electron beam, which is accelerated and then penetrates the ultra - thin film sample. Signals generated by the interaction between electrons and the sample are used for imaging. The device has automatic axis adjustment and image adjustment functions to ensure the accuracy and stability of imaging.Performance：The acceleration voltage is 200kV. It can achieve quick specimen exchange (within 2 minutes) and high - voltage application (only 3 minutes from standby to 200kV). It can provide high - resolution Scanning Transmission Electron Microscopy (STEM) images and Scanning Electron Microscopy (SEM) images. A resolution of 0.204nm can be guaranteed in the phase - contrast image (magnification ×4,000,000, with the sample being a gold single - crystal thin film). It supports nano - area electron diffraction and can display it simultaneously with the STEM image. It is equipped with a high - sensitivity EDX analysis function, with an X - ray extraction angle of over 25° and a solid angle of over 0.3 sr. It can also be equipped with a high - speed and high - sensitivity in - house EELS imaging device to achieve real - time imaging of light elements and transition metals.