应用材料 OPAL 7830Si 扫描电子显微镜。用途：主要用于半导体制造过程中的检测与分析，也可应用于材料科学研究等领域。可对晶圆表面形貌等进行观察，帮助检测晶圆制造中的缺陷，分析材料微观结构。技术原理：通过电子枪发射电子束，经电磁透镜聚焦后扫描样品表面，样品产生二次电子、背散射电子等信号，探测器收集这些信号并转化为电信号，再经处理后形成图像，以此呈现样品表面细节。性能：可兼容 8 英寸晶圆。具备较高的分辨率，能清晰呈现样品微观结构。放大倍数可满足半导体检测等多种需求，可实现对样品的精细观察。配备自动化控制系统，能提高检测效率和准确性，具有较好的稳定性和重复性，可长时间稳定工作。Product Name: Applied Materials OPAL 7830Si Scanning Electron Microscope.Purpose: It is mainly used for inspection and analysis in the semiconductor manufacturing process, and can also be applied to materials science research and other fields. It can observe the surface morphology of wafers, help detect defects in wafer manufacturing, and analyze the micro - structure of materials.Technical Principle: The electron gun emits an electron beam, which is focused by an electromagnetic lens and then scans the sample surface. The sample generates signals such as secondary electrons and back - scattered electrons. The detector collects these signals and converts them into electrical signals, which are then processed to form images, thus presenting the surface details of the sample.Performance: It is compatible with 8 - inch wafers. It has a high resolution, which can clearly show the micro - structure of the sample. The magnification can meet the needs of various semiconductor detection requirements, enabling fine observation of the sample. Equipped with an automatic control system, it can improve the detection efficiency and accuracy, and has good stability and repeatability, and can work stably for a long time.