日立 HITACHI S-3000 扫描电子显微镜用途:广泛用于材料科学、生物学、医学、半导体等领域。可对各类样品,如金属、陶瓷、生物切片等,进行微观表面结构观察,获取表面形貌、颗粒大小及分布等信息,还能结合能谱仪开展微区化学成分分析。技术原理:电子枪发射电子束,在加速电压作用下,经电子透镜聚焦,扫描样品表面。样品受电子束激发,产生二次电子、背散射电子等信号,仪器收集、放大这些信号,并转化为图像以呈现样品微观特征。性能:加速电压 0.3 - 30 kV;在 25 kV 高真空模式下,二次电子像分辨率为 3.0nm;背散射电子像分辨率在 25 kV 可变压力模式下为 4.5nm;放大倍率 15× - 300,000×;可变压力范围 1 - 270 Pa;最大样品尺寸直径 150mm、高 20mm;样品台 X 向 100mm、Y 向 50mm、Z 向 5 - 40mm,倾斜 0 - 60 度,可 360 度旋转 。Product Name: Hitachi HITACHI S-3000 Scanning Electron MicroscopePurpose: It is widely used in fields such as materials science, biology, medicine, and semiconductors. It can observe the micro surface structures of various samples, such as metals, ceramics, and biological sections, to obtain information such as surface morphology, particle size and distribution. It can also conduct micro-area chemical composition analysis in combination with an energy spectrometer.Technical Principle: The electron gun emits an electron beam. Under the action of the acceleration voltage, it is focused by the electron lens and scans the sample surface. The sample is excited by the electron beam to generate signals such as secondary electrons and backscattered electrons. The instrument collects and amplifies these signals and converts them into images to present the micro characteristics of the sample.Performance: The acceleration voltage is 0.3 - 30 kV. The resolution of the secondary electron image is 3.0 nm in the 25 kV high-vacuum mode. The resolution of the backscattered electron image is 4.5 nm in the 25 kV variable-pressure mode. The magnification is 15× - 300,000×. The variable-pressure range is 1 - 270 Pa. The maximum sample size is 150 mm in diameter and 20 mm in height. The sample stage has an X-direction of 100 mm, a Y-direction of 50 mm, a Z-direction of 5 - 40 mm, a tilt of 0 - 60 degrees, and can rotate 360 degrees.