日立 HITACHI RS - 3000T 扫描电子显微镜用途：用于半导体制造等领域的缺陷审查。可快速对芯片等半导体器件表面或内部缺陷进行检测与分析，助力提升产品质量和生产效率。技术原理：通过发射电子束扫描样品，收集电子与样品相互作用产生的信号，经处理和分析识别缺陷。性能：缺陷审查速度可达 600dph（每小时检测缺陷数）；具备无需预先训练的自动缺陷分类能力；可对 8 英寸 - 12 英寸的制程进行相关测量分析工作 。Product Name: Hitachi HITACHI RS - 3000T Scanning Electron MicroscopePurpose: It is used for defect review in fields such as semiconductor manufacturing. It can quickly detect and analyze defects on the surface or inside semiconductor devices like chips, helping to improve product quality and production efficiency.Technical Principle: By emitting an electron beam to scan the sample, it collects the signals generated by the interaction between electrons and the sample, and then identifies defects through processing and analysis.Performance: The defect review speed can reach 600 dph (defects per hour). It has a teaching - free automatic defect classification capability. It can conduct relevant measurement and analysis work for 8 - inch to 12 - inch processes.