日立 HITACHI FS300i Type II用途：用于缺陷检测。技术原理：利用声学原理，通过发射和接收声波对检测对象内部结构进行扫描成像，以识别缺陷。性能：具备高分辨率成像能力，可精准检测微小缺陷，能够对不同尺寸的晶圆（如 2011 尺寸）等对象进行有效检测。Product Name: HITACHI FS300i Type IIPurpose: Used for defect inspection.Technical Principle: Utilizes the acoustic principle. It scans and images the internal structure of the inspected object by transmitting and receiving sound waves to identify defects.Performance: It has high - resolution imaging capabilities and can accurately detect minute defects. It can effectively inspect objects such as wafers of different sizes (e.g., 2011 size).