COXEM CX - 200TA 扫描电子显微镜用途：适用于材料科学、生物学、地质学等领域。可用于观察样品微观形貌，分析材料成分和晶体结构，辅助研究材料微观特征、生物样本细微结构以及地质矿物颗粒微观情况等 。技术原理：由自动控制、预对中的发叉式钨丝阴极发射电子束，电子束经 2 个聚光镜和 1 个圆锥形物镜聚焦后扫描样品表面。电子与样品相互作用产生二次电子、背散射电子等信号，E - T 型 SE 探测器收集二次电子信号成像，展现样品表面精细形貌，可选配高灵敏四分割半导体 Bse 探测器获取材料成分反差像 。性能：二次电子图象分辨率在 30KV、WD = 5mm 时为 3nm；10nm（3KV，SEI）。背散射电子成像分辨率（选配件）在 30kV 时为 4.0nm 。放大倍数 10x ~ 300,000x 。加速电压 0.5kV ~ 30kV 。样品室内径 φ210mm，可接配 EDS、BSE、WDS、EBSD 等分析附件。五轴计算机导航马达驱动样品台，行程为 X：65㎜，Y：40㎜，Z：5 - 65㎜，T： - 20 ~＋90°，R：360° 。采用涡轮分子泵 260 升 / 秒＋旋片式机械泵 100L/min 的真空系统，高真空下样品室处真空度优于 7.5x10 - 5 Torr 。Product Name: COXEM CX - 200TA Scanning Electron MicroscopePurpose: It is applicable to fields such as materials science, biology, and geology. It can be used to observe the microscopic morphology of samples, analyze the composition and crystal structure of materials, and assist in studying the microscopic characteristics of materials, the fine structures of biological samples, as well as the microscopic conditions of geological mineral particles.Technical Principle: An electron beam is emitted by an automatically controlled and pre - centered hairpin - type tungsten filament cathode. The electron beam is focused by two condenser lenses and one conical objective lens and then scans the sample surface. The interaction between electrons and the sample generates signals such as secondary electrons and backscattered electrons. The E - T type SE detector collects secondary electron signals for imaging, showing the fine surface morphology of the sample. A highly sensitive four - segmented semiconductor Bse detector can be optionally equipped to obtain the material composition contrast image.Performance: The resolution of secondary electron images is 3nm at 30KV and WD = 5mm; 10nm (3KV, SEI). The resolution of backscattered electron imaging (optional) is 4.0nm at 30kV. The magnification is 10x to 300,000x. The acceleration voltage is 0.5kV to 30kV. The inner diameter of the sample chamber is φ210mm, and analysis accessories such as EDS, BSE, WDS, and EBSD can be connected. It has a five - axis computer - navigated motor - driven sample stage with a travel of X: 65 ㎜, Y: 40 ㎜, Z: 5 - 65 ㎜, T: - 20 ~＋90°, R: 360°. It adopts a vacuum system with a turbomolecular pump of 260 liters per second + a rotary vane mechanical pump of 100L/min. Under high vacuum, the vacuum degree at the sample chamber is better than 7.5x10 - 5 Torr.