日立 HITACHI S-7800H 扫描电子显微镜用途：广泛应用于材料科学、生物医学、半导体等领域，用于观察样品微观形貌、分析结构及成分。技术原理：电子枪发射电子束，经电磁透镜聚焦、偏转后轰击样品表面，产生二次电子、背散射电子等信号，探测器收集信号成像。性能：分辨率可达 5nm（二次电子探测器）；放大倍数最高 150,000 倍；加速电压 0.5kV - 15kV；可处理 6"-8" 晶圆样品，测量范围 0.1mm - 10mm，测量重复性 15nm（3σ） 。Product Name: Hitachi HITACHI S-7800H Scanning Electron MicroscopePurpose: Widely used in fields such as materials science, biomedicine, and semiconductors for observing the micro - morphology of samples, analyzing structures, and compositions.Technical Principle: The electron gun emits an electron beam, which is focused and deflected by electromagnetic lenses and then bombards the sample surface. Signals such as secondary electrons and backscattered electrons are generated, and detectors collect these signals for imaging.Performance: Resolution can reach 5nm (secondary electron detector); maximum magnification is 150,000 times; acceleration voltage ranges from 0.5kV - 15kV; can handle 6" - 8" wafer samples, with a measurement range of 0.1mm - 10mm and a measurement repeatability of 15nm (3σ).