日立 HITACHI S-7800 扫描电子显微镜用途：适用于材料科学、生物医学、半导体等多领域，用于观察样品微观形貌、分析结构及成分。技术原理：电子枪发射电子束，经电磁透镜聚焦、偏转后轰击样品表面，产生二次电子、背散射电子等信号，探测器收集信号并成像。性能：二次电子探测器分辨率达 5nm；放大倍数最高 150,000 倍；加速电压 0.5kV - 15kV；可处理 6"-8" 晶圆样品，测量范围 0.1mm - 10mm，测量重复性 15nm（3σ）。Product Name: Hitachi HITACHI S-7800 Scanning Electron MicroscopePurpose: Suitable for multiple fields such as materials science, biomedicine and semiconductors, used to observe the micro - morphology of samples, analyze structures and compositions.Technical Principle: The electron gun emits an electron beam, which is focused and deflected by electromagnetic lenses and then bombards the sample surface. Signals such as secondary electrons and backscattered electrons are generated, and detectors collect these signals for imaging.Performance: Resolution of the secondary electron detector reaches 5nm; maximum magnification is 150,000 times; acceleration voltage ranges from 0.5kV - 15kV; can handle 6" - 8" wafer samples, with a measurement range of 0.1mm - 10mm and a measurement repeatability of 15nm (3σ).