赛默飞 FEI Nova NanoSEM 230 场发射扫描电子显微镜用途：用于材料科学、纳米技术、生物学、半导体等领域，可对金属、非金属、生物等各类样品进行纳米尺度的形貌分析、微区成分分析、微观组织结构分析等，助力研究材料微观结构、纳米材料特性、生物样品细微特征及半导体器件缺陷等。技术原理：通过场发射电子枪产生高亮度电子束，经电磁透镜聚焦后扫描样品表面。电子与样品相互作用产生二次电子、背散射电子等信号，探测器收集并转化为图像。其 Helix 探测技术将浸入式透镜和低真空扫描电镜技术相结合，能在低真空环境抑制非导电材料的电荷积累效应及电子束诱导污染。性能：分辨率方面，高真空模式下 15kV 时达 1.0nm、1kV 时为 1.8nm、30kV（STEM 探测器）时 0.8nm；低真空模式 10kV（Helix 探测器）时 1.5nm、3kV（Helix 探测器）时 1.8nm。加速电压 200V - 30kV 连续可调，电子束流范围 0.3pA - 100nA 连续可调。样品台 X、Y 方向移动范围各 50mm。可配备能谱仪进行微区成份分析，如探头分辨率优于 133eV（Mn - Ka 在 100,000CPS 计数率下） 。Product Name: Thermo Fisher FEI Nova NanoSEM 230 Field Emission Scanning Electron MicroscopePurpose: It is used in fields such as materials science, nanotechnology, biology, and semiconductors. It can conduct nanoscale morphology analysis, micro - area composition analysis, and microstructure analysis on various samples such as metals, non - metals, and biological specimens, facilitating the study of material microstructure, nanomaterial properties, fine features of biological samples, and defects of semiconductor devices.Technical Principle: A high - brightness electron beam is generated by a field emission electron gun, focused by electromagnetic lenses, and then scans the sample surface. The interaction between electrons and the sample generates signals such as secondary electrons and backscattered electrons, which are collected by detectors and converted into images. Its Helix detection technology combines immersion lens and low - vacuum scanning electron microscopy techniques, which can suppress the charge accumulation effect of non - conductive materials and electron beam - induced contamination in a low - vacuum environment.Performance: In terms of resolution, in high - vacuum mode, it reaches 1.0nm at 15kV, 1.8nm at 1kV, and 0.8nm at 30kV (STEM detector); in low - vacuum mode, it is 1.5nm at 10kV (Helix detector) and 1.8nm at 3kV (Helix detector). The acceleration voltage is continuously adjustable from 200V to 30kV, and the electron beam current range is continuously adjustable from 0.3pA to 100nA. The sample stage has a movement range of 50mm in both the X and Y directions. It can be equipped with an energy spectrometer for micro - area composition analysis. For example, the probe resolution is better than 133eV (Mn - Ka at a count rate of 100,000CPS).