日立 HITACHI S-6200H 扫描电子显微镜用途：常用于半导体制造、材料研究等领域。能对晶圆等样品进行微观结构观察与尺寸测量，可在不破坏样品前提下，检测光阻、金属层等特征，助力工艺优化与质量控制。技术原理：利用热场发射电子源发射电子束，经电磁透镜聚焦、加速后轰击样品表面。电子与样品相互作用产生二次电子、背散射电子等信号，探测器收集并转化为图像呈现微观特征。性能：加速电压 0.5 - 30kV；分辨率可达 4nm（15kV，二次电子像）；放大倍数 25 - 80 万倍；可处理 6 英寸晶圆；电子束流范围广，能满足不同分析需求 。Product Name: Hitachi HITACHI S-6200H Scanning Electron MicroscopePurpose: Commonly used in fields such as semiconductor manufacturing and materials research. It can observe the microstructures and measure the dimensions of samples like wafers. Without damaging the samples, it can detect features of photoresist, metal layers, etc., contributing to process optimization and quality control.Technical Principle: Utilizes a thermal field emission electron source to emit an electron beam. The beam is focused and accelerated by electromagnetic lenses and then bombards the sample surface. Electrons interact with the sample to generate signals such as secondary electrons and backscattered electrons. Detectors collect and convert these signals into images to present micro - characteristics.Performance: Acceleration voltage ranges from 0.5 - 30kV; resolution can reach 4nm (at 15kV, secondary electron image); magnification is from 25 - 800,000 times; can handle 6 - inch wafers; has a wide range of electron beam currents to meet different analysis requirements.