日立 HITACHI CG-5000 扫描电子显微镜用途：满足新一代半导体器件开发及制造过程中对更高精度和多功能性需求。技术原理：重新设计传输系统，采用改良电子光学和图像处理技术。性能：分辨率达 1.45nm（带信号处理功能）；测量重复性为 0.25nm（3σ）；吞吐量 50 片晶圆 / 小时（每片晶圆 20 次测量），比 CG4000 系列约高 40% 。Product Name: Hitachi HITACHI CG - 5000 Scanning Electron MicroscopePurpose: To meet the needs for higher accuracy and versatility in the development and manufacturing processes of new - generation semiconductor devices.Technical Principle: Redesign the transfer system and employ improved electron optics and image processing technologies.Performance: Resolution reaches 1.45nm (with signal processing function); Measurement repeatability is 0.25nm (3σ); Throughput is 50 wafers per hour (20 measurements per wafer), approximately 40% higher than the CG4000 series.