卡尔蔡司 Merlin 场发射扫描电子显微镜用途：适用于材料科学、生物学、半导体、地质等多领域。可对金属、陶瓷、高分子、生物样本等各类样品进行微观形貌观察，分析晶体结构、相组织，开展微区化学成分定性与半定量检测，研究粉末、微粒纳米样品形态与粒度，以及复合材料界面特性等 。技术原理：采用新一代专利 GEMINI 镜筒设计，由电子枪发射电子束，经电磁、静电复合式物镜等聚焦后扫描样品表面。电子与样品相互作用产生二次电子、背散射电子等信号。创新的 Inlens Duo 探测器位于镜筒电子束光路上，可高效接收二次电子与背散射电子信号用于成像，且杂散磁场小，利于对铁磁体样品成像 。性能：具备优良的高、低加速电压性能。二次电子像分辨率可达亚纳米级，背散射电子像分辨率同样出色。试样工作距离不受背散射探测器过多影响，能靠近极靴以获取高分辨率图像。放大倍数范围广，可满足不同观察需求。配备全自动无油旋转泵 + 分子泵 + 离子泵抽真空系统，超大样品室搭配五轴马达驱动优中心样品台 。Product Name: Carl Zeiss Merlin Field Emission Scanning Electron MicroscopePurpose: It is applicable to multiple fields such as materials science, biology, semiconductors, and geology. It can be used to observe the microscopic morphology of various samples like metals, ceramics, polymers, and biological specimens, analyze crystal structures and phase organizations, conduct qualitative and semi - quantitative detection of micro - area chemical compositions, study the morphology and particle size of powder and nanoparticle samples, as well as the interface characteristics of composite materials.Technical Principle: It adopts the new - generation patented GEMINI column design. An electron beam is emitted by an electron gun and focused by electromagnetic and electrostatic compound objectives, etc., and then scans the sample surface. The interaction between electrons and the sample generates signals such as secondary electrons and backscattered electrons. The innovative Inlens Duo detector is located on the electron beam path in the column, which can efficiently receive secondary electron and backscattered electron signals for imaging. Moreover, it has a small stray magnetic field, which is beneficial for imaging ferromagnetic samples.Performance: It has excellent high - and low - acceleration voltage performance. The resolution of secondary electron images can reach the sub - nanometer level, and the resolution of backscattered electron images is also excellent. The working distance of the specimen is not overly affected by the backscattered detector, and it can be close to the pole piece to obtain high - resolution images. It has a wide magnification range to meet different observation requirements. It is equipped with a fully automatic oil - free rotary pump + molecular pump + ion pump vacuum system, a large sample chamber, and a five - axis motor - driven eucentric sample stage.