卡尔蔡司 Evo MA15 扫描电子显微镜。用途：适用于材料科学、生命科学、工业质量保证和失效分析等领域7。可对各类材料进行表面形貌观察、成分分析等，常用于地质、法医鉴定等方面2。技术原理：采用钨灯丝作为光源，具有自动加热和对中功能3。电子束经聚焦后扫描样品，样品产生二次电子和背散射电子等信号，由探测器接收成像。可变压力操作模式可对非导电样品成像，配合多种探测器，如二次电子探测器、背散射电子探测器等获取不同图像信息7。性能：加速电压 200V-30kV，10V 步进连续可调3。放大倍数 5×-1000,000× 连续可调3。高真空二次电子像分辨率＜3.0nm（30kV），低真空背散射电子像＜4.0nm（30kV）3。可放置最大样品尺寸为直径 250mm、高度 145mm，配备五轴全自动样品台3。Product Name: Carl Zeiss Evo MA15 Scanning Electron Microscope.Purpose: It is applicable to fields such as materials science, life science, industrial quality assurance, and failure - analysis7. It can be used for surface morphology observation and composition analysis of various materials, and is often used in geology, forensic identification, etc2.Technical Principle: It uses a tungsten - filament as the light source, which has the functions of automatic heating and centering3. The electron beam is focused and then scans the sample. The sample generates signals such as secondary electrons and back - scattered electrons, which are received by the detector for imaging. The variable - pressure operation mode can image non - conductive samples, and with a variety of detectors, such as secondary electron detectors and back - scattered electron detectors, different image information can be obtained7.Performance: The acceleration voltage is 200V - 30kV, continuously adjustable in 10V steps3. The magnification is continuously adjustable from 5× to 1,000,000×3. The resolution of high - vacuum secondary electron images is less than 3.0nm (30kV), and the resolution of low - vacuum back - scattered electron images is less than 4.0nm (30kV)3. The maximum sample size that can be placed is 250mm in diameter and 145mm in height, and it is equipped with a five - axis fully automatic sample stage3.