东京精密 TOKYO SEIMITSU UF 200A/AL用途：适用于半导体、电子元器件制造等领域，主要用于 5-8 英寸晶圆的性能测试，如集成电路的电性能测试、晶圆级可靠性检测等，助力企业把控产品质量。性能：支持 5-8 英寸晶圆测试。运用 OTS 光学自动对准技术，综合精度可达 ±2um 。具备 inkless map、multisite 测试功能，最高能进行 150 度高温测试。可输出最高 200g 探测力，适配高密度细间距产品检测。其专利十字形 Z 轴设计，运动精准且有效降低空转与噪音。自动静电吸盘维持测试表面平整。配备便捷软件，支持多样模拟与数字测量以及热测试。还有卡盘加热器、热卡盘、探针臂等多种可选配件，能提升测试效率。

英文Product Name: TOKYO SEIMITSU UF 200A/ALPurpose: It is applicable to fields such as semiconductors and electronic component manufacturing. It is mainly used for performance testing of 5 - 8 inch wafers, such as electrical performance testing of integrated circuits and wafer - level reliability testing, helping enterprises control product quality.Performance: It supports 5 - 8 inch wafer testing. Using OTS optical automatic alignment technology, the comprehensive accuracy can reach ±2um. It has functions like inkless map and multisite testing and can conduct high - temperature testing up to 150 degrees. It can output a maximum probing force of 200g, suitable for detecting high - density fine - pitch products. Its patented cross - shaped Z - axis design ensures accurate movement and effectively reduces idle motion and noise. The automatic electrostatic chuck maintains a flat test surface. It is equipped with convenient software, supporting various analog and digital measurements and thermal testing. There are also various optional accessories such as a chuck heater, a hot chuck, probe arms, etc., which can improve testing efficiency.