基恩士 KEYENCE VK-X200series 形状测量激光显微镜用途：集光学显微镜、扫描电镜和粗糙度仪功能于一体，能对几乎任何材料进行非接触式轮廓、粗糙度和厚度测量，可用于材料微观结构观察、电子元件缺陷检测等多领域。技术原理：采用针孔共聚焦光学系统，配备激光和白光源。激光光源（408nm 紫激光）在 x、y 方向扫描目标物表面获取数据，利用三角测量原理计算各点与显微镜距离以构建 3D 模型；白光源辅助获取更多图像细节。性能：光学变焦 1 至 8 倍，综合倍率 200 至 24000 倍；高度测量范围 7mm，显示分辨率 0.0005µm，重复精度 σ 为 0.012µm；宽度显示分辨率 0.001µm，重复精度 3σ 为 0.02µm；面扫描帧频率 4 至 120Hz，线扫描 7900Hz 。

Product Name: KEYENCE VK-X200series Shape Measurement Laser MicroscopePurpose: Integrating the functions of an optical microscope, a scanning electron microscope, and a roughness tester, it can perform non-contact profile, roughness, and thickness measurements on nearly any material. It can be used in multiple fields such as observing material microstructure and detecting defects in electronic components.Technical Principle: It adopts a pinhole confocal optical system and is equipped with a laser source and a white light source. The laser source (408 nm violet laser) scans the surface of the target object in the x and y directions to obtain data. The triangulation principle is used to calculate the distance of each point from the microscope to construct a 3D model. The white light source assists in obtaining more image details.Performance: The optical zoom is 1 to 8 times, and the comprehensive magnification is 200 to 24000 times. The height measurement range is 7 mm, the display resolution is 0.0005 µm, and the repeatability accuracy σ is 0.012 µm. The width display resolution is 0.001 µm, and the repeatability accuracy 3σ is 0.02 µm. The frame frequency for area scanning is 4 to 120 Hz, and for line scanning is 7900 Hz.