基恩士 KEYENCE VK-X110 形状测量激光显微镜用途：适用于多行业，如电池、汽车、液晶、印刷电路板等。可对各类材质目标物进行非接触式形状测量，能获取电气特性与胶形状的相关性；可测量湿润状态下电阻膜、焊锡膏厚度；还能评估表面状态、管理工具磨损量等。技术原理：采用针孔共聚焦光学系统，通过激光在 x 和 y 方向二维扫描，将视场划分为像素，利用光电倍增管（PMT）检测各像素反射光。通过电机在垂直方向移动物镜或样品，同时检测物镜位置信息与光接收量，针孔过滤离焦光，仅检测聚焦像素，从而获取样品高度信息。性能：物镜放大倍率有 10 倍、20 倍、50 倍、100 倍等，综合倍率 200 至 16000 倍；观察 / 测量范围水平方向在不同倍率下为 135 - 1350μm，垂直方向为 101 - 1012μm；高度测量范围 7mm，显示分辨率 0.005μm，重复精度 σ 为 0.02μm；宽度显示分辨率 0.01μm，重复精度 3σ 为 0.03μm 。

Product Name: KEYENCE VK-X110 Shape Measurement Laser MicroscopePurpose: It is suitable for multiple industries, such as battery, automotive, liquid crystal, printed circuit board, etc. It can perform non-contact shape measurement on target objects of various materials, obtain the correlation between electrical properties and adhesive shape, measure the thickness of resist films and solder pastes in wet state, evaluate surface conditions, manage tool wear, etc.Technical Principle: It adopts a pinhole confocal optical system. The laser scans two-dimensionally in the x and y directions, dividing the field of view into pixels, and the photomultiplier tube (PMT) detects the reflected light of each pixel. A motor is used to move the objective lens or the sample in the vertical direction. During this process, the position information of the objective lens and the amount of received light are detected simultaneously. The pinhole filters out of - focus light and only detects in - focus pixels to obtain the height information of the sample.Performance: The objective lens magnification includes 10x, 20x, 50x, 100x, etc., with a comprehensive magnification of 200 to 16000 times. The horizontal observation/measurement range is 135 - 1350μm at different magnifications, and the vertical range is 101 - 1012μm. The height measurement range is 7mm, the display resolution is 0.005μm, and the repeatability accuracy σ is 0.02μm. The width display resolution is 0.01μm, and the repeatability accuracy 3σ is 0.03μm.