基恩士 KEYENCE VH - S30B 自由角度观察系统用途：用于材料、电子、机械等行业的微观检测与分析，可从自由角度观察样品表面微观结构，助力缺陷检测、质量控制，以及微观尺度下的研究 。性能：XY 电动载物台，移动范围 X 为 ±37.5mm，Y 为 ±25mm ，分辨率达 1µm 。Z 轴为电动，移动范围 29mm ，分辨率 1µm ，最大移动速度 5mm / 秒 。旋转角度 360 度，能全方位观察样品 。载物台顶部尺寸 180×136mm ，负载能力 1kg 。工作环境温度 + 5 至 40°C ，相对湿度 35 至 80% RH（无冷凝） 。系统搭配的电机为 2 相步进电机 。

Product Name: Keyence KEYENCE VH - S30B Free - Angle Observation SystemPurpose: It is used for microscopic inspection and analysis in industries such as materials, electronics, and machinery. It can observe the microscopic structure of the sample surface from a free angle, facilitating defect detection, quality control, and research at the micro scale.Performance: The XY motorized stage has a movement range of ±37.5mm in X and ±25mm in Y, with a resolution of 1µm. The Z - axis is motorized, with a movement range of 29mm, a resolution of 1µm, and a maximum movement speed of 5mm/s. The rotation angle is 360 degrees, enabling all - round observation of the sample. The top size of the stage is 180×136mm, and the load capacity is 1kg. The working environment temperature is +5 to 40°C, and the relative humidity is 35 to 80%RH (no condensation). The motor equipped in the system is a 2 - phase stepper motor.