翟柯 ZYGO Zygo-FPM.G3.5HS1用途:用于高精度光学测量,可对薄光学元件等进行检测,适用于移动设备显示平整度、AR/VR 光学、半导体晶圆厚度等先进应用场景,以提升质量与过程控制。技术原理:基于傅里叶叠层显微成像(FPM)技术,该技术结合大孔径和高分辨率特点,通过迭代合成不同照明条件下低分辨率强度图像在傅里叶空间中的信息,实现宽视场、高分辨率成像,还能校正像差并扩展景深。性能:能实现超越传统光学显微镜受衍射极限约束的分辨率与视场,如在 632 纳米波长下,分辨率可达 0.78 微米,视场约为 120 平方毫米,且具有 0.3 毫米的深度焦点(在相同条件下测量) 。
Product Name: Zygo Zygo-FPM.G3.5HS1 by ZYGOPurpose: It is used for high-precision optical measurement and can detect thin optical components, etc. It is suitable for advanced application scenarios such as mobile device display flatness, AR/VR optics, semiconductor wafer thickness, etc., to improve quality and process control.Technical Principle: Based on Fourier Ptychographic Microscopy (FPM) technology, this technology combines the characteristics of large aperture and high resolution. By iteratively synthesizing the information of low-resolution intensity images in the Fourier space under different illumination conditions, it realizes wide-field and high-resolution imaging, and can also correct aberrations and expand the depth of field.Performance: It can achieve a resolution and field of view beyond the constraints of the diffraction limit of traditional optical microscopes. For example, at a wavelength of 632 nm, the resolution can reach 0.78 μm, the field of view is about 120 square millimeters, and it has a depth of focus of 0.3 mm (measured under the same conditions).