CHA SEC 1000 真空蒸发系统用途：适用于科研与工业领域，主要用于在各类基底上沉积金属、合金及化合物薄膜，可应用于半导体芯片制造、光学元件镀膜、材料研究等场景。性能：具备较大尺寸的基底板，能容纳多个用于仪器仪表、控制和旋转运动的馈通装置。常搭配大尺寸钟罩和行星夹具，可放置多片大尺寸晶圆。平均抽气时间短，生产效率高。拥有先进的晶体沉积监测仪，可精确控制薄膜沉积过程。配备高性能扩散泵和前级泵，以及钟罩的电动提升装置，还具备电子束电源及控制装置与带快门的电子枪，以保障高质量的薄膜沉积 。

Product Name: CHA SEC 1000 Vacuum Evaporation SystemPurpose: It is suitable for scientific research and industrial fields, mainly used for depositing thin films of metals, alloys, and compounds on various substrates. It can be applied in scenarios such as semiconductor chip manufacturing, optical component coating, and materials research.Performance: It has a relatively large - sized baseplate that can accommodate multiple feedthroughs for instrumentation, control, and rotary motion. It is often equipped with a large - sized bell jar and a planetary fixture, which can hold multiple large - sized wafers. The average pump - down time is short, resulting in high production efficiency. It has an advanced crystal deposition monitor to precisely control the thin - film deposition process. It is equipped with high - performance diffusion pumps and roughing pumps, as well as a motorized hoist for the bell jar. It also has an e - beam power supply and control device and an e - gun with a shutter to ensure high - quality thin - film deposition.