瓦里安 VARIAN 3117用途：是一款热蒸发镀膜设备，常用于科研机构及小型生产企业，可在玻璃、硅片等多种基底材料上进行金属或有机材料薄膜的热蒸发沉积，适用于光学器件镀膜、半导体器件制造等对薄膜质量要求较高的领域。性能：拥有 18 英寸直径 ×30 英寸高的派热克斯玻璃钟罩，并配备防爆笼，保障操作安全。20 英寸直径的基板带有提升装置，便于放置和取出基底。搭载扩散泵、液氮冷阱及机械泵，能够营造高真空环境，确保薄膜沉积的高质量。部分型号配备 CTI 低温泵及压缩机，进一步提升真空性能。该设备可通过精准调控蒸发源温度和时间，实现对薄膜厚度及均匀性的有效控制，满足不同工艺需求 。

Product Name: VARIAN 3117Purpose: It is a thermal evaporation coating device, often used in research institutions and small - scale manufacturing enterprises. It can perform thermal evaporation deposition of metal or organic material thin films on a variety of substrate materials such as glass and silicon wafers, and is suitable for fields with high requirements for film quality, such as optical device coating and semiconductor device manufacturing.Performance: It has an 18 - inch diameter × 30 - inch high Pyrex glass bell jar equipped with an implosion cage to ensure operation safety. The 20 - inch diameter baseplate comes with a hoist, which is convenient for placing and removing substrates. It is equipped with a diffusion pump, a liquid nitrogen cold trap, and a mechanical pump, which can create a high - vacuum environment to ensure high - quality thin - film deposition. Some models are equipped with a CTI cryopump and a compressor to further enhance the vacuum performance. The device can effectively control the film thickness and uniformity by precisely adjusting the temperature and time of the evaporation source to meet different process requirements.