爱发科 ULVAC SIV - 850用途:这是一款真空溅射设备,适用于半导体、光学、平板显示等行业。在半导体领域,用于芯片制造中金属电极、绝缘层等薄膜的溅射沉积;在光学行业,可完成光学镜片增透膜、反射膜的制备;在平板显示行业,助力显示屏透明导电膜等关键薄膜的生产 。性能:虽然没有公开的详细参数,但基于爱发科的技术能力,推测其具备高效的真空系统,能够快速达到工艺所需的高真空环境,为高质量薄膜溅射提供保障。设备的溅射源稳定性高,可精准调控溅射速率,保证薄膜厚度均匀性,偏差极小。同时,拥有自动化的晶圆传送系统,能实现高效的连续生产,提高生产效率 。
Product Name: ULVAC SIV - 850Purpose: This is a vacuum sputtering device suitable for industries such as semiconductors, optics, and flat panel displays. In the semiconductor field, it is used for the sputter deposition of thin films such as metal electrodes and insulating layers in chip manufacturing. In the optical industry, it can complete the preparation of anti - reflection coatings and reflective coatings on optical lenses. In the flat panel display industry, it helps in the production of key thin films such as transparent conductive films for display screens.Performance: Although there are no publicly available detailed parameters, based on ULVAC's technical capabilities, it is inferred that it has an efficient vacuum system that can quickly reach the high - vacuum environment required by the process, providing a guarantee for high - quality thin - film sputtering. The sputtering source of the device has high stability, can precisely control the sputtering rate, ensure the uniformity of film thickness, and has a minimal deviation. At the same time, it has an automated wafer transfer system that can achieve efficient continuous production and improve production efficiency.