爱德华 EDWARDS Auto 500 薄膜沉积系统用途：为多功能前装载式薄膜系统，适用于研发或试生产场景。可进行热阻蒸发、电子束蒸发及磁控溅射等物理气相沉积工艺，能在半导体、光学、材料研究等领域，于各类基底材料上沉积薄膜，满足多样化的薄膜制备需求 。性能：真空腔室采用前开门箱式设计，安置在装载真空泵系统的基座上。具备多种配置，如可配备三个蒸发源（两个标准电阻源和一个用于有机物的低温源），或三个射频磁控阴极（两个直径 4 英寸，一个直径 3 英寸）。拥有 11 英寸直径的旋转基板载体、双晶膜厚监测仪、基板旋转控制器。配备涡轮泵与前级泵，可实现高真空环境。可选择无油干泵、分子泵及低温冷凝泵等不同真空系统 。

Product Name: EDWARDS Auto 500 Thin Film Deposition SystemPurpose: It is a versatile front - loading thin - film system suitable for research and development or pre - production scenarios. It can perform physical vapor deposition processes such as resistive evaporation, electron beam evaporation, and magnetron sputtering. It can deposit thin films on various substrate materials in fields such as semiconductors, optics, and materials research, meeting diverse thin - film preparation requirements.Performance: The vacuum chamber adopts a front - opening box - type design and is placed on a pedestal loaded with a vacuum pump system. It has a variety of configurations. For example, it can be equipped with three evaporation sources (two standard resistive sources and one low - temperature source for organics), or three RF magnetron cathodes (two with a diameter of 4 inches and one with a diameter of 3 inches). It has an 11 - inch - diameter rotating substrate carrier, a dual - crystal film thickness monitor, and a substrate rotation controller. It is equipped with a turbo pump and a roughing pump to achieve a high - vacuum environment. Different vacuum systems such as oil - free dry pumps, turbomolecular pumps, and cryogenic condensation pumps can be selected.