金属电子束蒸发台 Peva-600E用途：主要用于 Ti、Al、Ni、Au、Pt、Ag 等金属的镀膜，适用于信息科学与系统科学、物理学、化学、材料科学等学科领域。可在镀膜工艺流程中，将金属蒸发升腾并沉积到目标基底上，一炉可依次蒸镀 6 种不同金属，还能蒸镀高熔点金属 Pt、W 等。性能：基板尺寸可选 2、4、6 英寸。基板加热最高温度可达 250℃，控温精度为 1℃。系统极限真空度为 2×10⁻⁷torr。配备 6 个蒸发源坩埚。膜厚均匀性≤±5%。

Product Name: Peva - 600E Metal Electron - Beam EvaporatorPurpose: It is mainly used for coating metals such as Ti, Al, Ni, Au, Pt, and Ag, and is suitable for academic fields such as information science and systems science, physics, chemistry, and materials science. In the coating process, it can evaporate metals and deposit them on the target substrate. It can sequentially deposit 6 different metals in one furnace, and can also deposit high - melting - point metals such as Pt and W.Performance: The substrate size can be 2, 4, or 6 inches. The maximum substrate heating temperature can reach 250℃, and the temperature control accuracy is 1℃. The system ultimate vacuum is 2×10⁻⁷torr. It is equipped with 6 evaporation - source crucibles. The film thickness uniformity is ≤±5%.