爱德华 EDWARDS E306 热蒸发镀膜系统用途：适用于科研及工业领域的薄膜制备，可在半导体、光学、材料等行业的多种基底上，如硅片、玻璃、金属片等，蒸发金属、合金等材料以形成薄膜，常用于半导体芯片制造中的电极薄膜制备、光学镜片的功能性薄膜制作等。性能：为实验室规模的自包含电阻式热蒸发镀膜系统。内置测量仪表和电源，配备高真空扩散泵与前级泵，采用 12 英寸直径带防爆罩的石英钟罩。具备旋转倾斜样品架且速度可控，需外接水冷装置。虽暂无更多精确参数，但该设备能精准控制蒸发过程，实现对薄膜厚度和均匀性的有效调控，满足不同工艺对薄膜质量的要求 。

Product Name: EDWARDS E306 Thermal Evaporation Coating SystemPurpose: It is suitable for thin - film preparation in scientific research and industrial fields. It can evaporate materials such as metals and alloys on a variety of substrates in industries like semiconductors, optics, and materials, such as silicon wafers, glass, and metal sheets, to form thin films. It is often used in the preparation of electrode thin films in semiconductor chip manufacturing and the production of functional thin films for optical lenses.Performance: It is a self - contained resistive thermal evaporation coating system for laboratory use. It has built - in gauges and a power supply, is equipped with a high - vacuum diffusion pump and a roughing pump, and uses a 12 - inch - diameter quartz bell jar with an implosion shield. It has a rotating and tilting sample holder with controllable speed and requires an external water - cooling device. Although there are no more precise parameters available for the moment, this equipment can precisely control the evaporation process to effectively regulate the film thickness and uniformity, meeting the requirements for film quality in different processes.