巴尔查斯 BALZERS Z 660 物理气相沉积(PVD)设备用途:广泛应用于工具制造、半导体、航空航天等行业。在工具制造中,为刀具、模具等提供高性能涂层,提升其耐磨性与使用寿命;在半导体领域,可用于芯片制造过程中的薄膜沉积;在航空航天方面,能增强零部件的抗腐蚀、抗磨损能力 。性能:具备先进的涂层技术,可沉积氮化物基与氧化物基涂层,如 TiN、TiCN、TiAlN 等。拥有高效的真空系统,能快速达到高真空环境,保障涂层质量。配备多个靶材蒸发源,每批次可实现多个靶材的蒸发量,提高生产效率。涂层均匀性高,能确保产品各部位性能一致。设备占地面积小,结构紧凑,便于安装与维护 。
Product Name: BALZERS Z 660 Physical Vapor Deposition (PVD) EquipmentPurpose: It is widely used in industries such as tool manufacturing, semiconductors, and aerospace. In tool manufacturing, it provides high-performance coatings for cutting tools, molds, etc., improving their wear resistance and service life. In the semiconductor field, it can be used for thin-film deposition during chip manufacturing. In aerospace, it can enhance the corrosion and wear resistance of components.Performance: It has advanced coating technologies and can deposit nitride-based and oxide-based coatings, such as TiN, TiCN, TiAlN, etc. It has an efficient vacuum system that can quickly reach a high-vacuum environment to ensure coating quality. It is equipped with multiple target evaporation sources, and the evaporation of multiple targets can be achieved in each batch, improving production efficiency. The coating has high uniformity, ensuring consistent performance of all parts of the product. The equipment has a small footprint and a compact structure, which is convenient for installation and maintenance.