爱发科 ULVAC SMD - 750用途:这是一款在半导体及光电器件制造领域应用广泛的设备,常用于各类薄膜的蒸镀工艺。例如在 LED 外延(InGaN/GaN 多量子阱)制程中,助力提升发光效率;也可用于半导体芯片制造里的金属布线、介质层沉积等环节,对推动芯片性能提升发挥关键作用。性能:虽未明确具体参数,但依据爱发科技术实力推断,其具备高真空环境营造能力,能实现快速抽气,为薄膜沉积提供稳定且低气压的空间。在薄膜沉积速率和均匀性上表现出色,也许可精准调控蒸镀速率,使薄膜在基底上均匀覆盖,偏差极小。设备的稳定性佳,可长时间连续运行,减少因设备故障导致的生产中断,有效提升生产效率 。
Product Name: ULVAC SMD - 750Purpose: This is a device widely used in the semiconductor and optoelectronic device manufacturing fields, often used in various thin - film evaporation processes. For example, in the LED epitaxy (InGaN/GaN multi - quantum well) process, it helps to improve the luminous efficiency; it can also be used in metal wiring, dielectric layer deposition and other links in semiconductor chip manufacturing, playing a key role in promoting the performance improvement of chips.Performance: Although specific parameters are not clear, based on ULVAC's technical strength, it has the ability to create a high - vacuum environment and can achieve rapid pumping, providing a stable and low - pressure space for thin - film deposition. It performs well in thin - film deposition rate and uniformity. Perhaps it can precisely control the evaporation rate, making the thin film evenly cover the substrate with minimal deviation. The device has good stability and can operate continuously for a long time, reducing production interruptions caused by equipment failures and effectively improving production efficiency.