维易科 VEECO IBS - 2用途：用于离子束溅射镀膜，适用于对薄膜质量要求极高的激光光学等应用场景。在光学元件表面镀膜，可助力光学元件在严苛激光环境下达到最佳性能。性能：该系统可配备 6 个靶材及两个离子枪，能产生激光光学元件，如激光反射镜的反射率大于 99.99% 且具备高激光损伤阈值；激光透镜和激光窗片损耗低；激光滤光片可承受高激光能量且转换能力强。可在 6 英寸晶圆上作业，薄膜具有致密、无孔隙、均匀的涂层，对温度波动不敏感，镀膜后光学元件表面缺陷少，能有效减少光处理过程中的吸收和散射 。

Product Name: VEECO IBS - 2Purpose: It is used for ion beam sputtering coating and is suitable for application scenarios such as laser optics with extremely high requirements for film quality. Coating on the surface of optical components can help optical components achieve optimal performance in harsh laser environments.Performance: This system can be equipped with 6 targets and two ion guns and can produce laser optical components. For example, the reflectivity of laser mirrors is greater than 99.99% and has a high laser damage threshold; laser lenses and laser windows have low losses; laser filters can withstand high laser energy and have strong switching capabilities. It can operate on 6 - inch wafers. The thin films have dense, pore - free, and uniform coatings, are insensitive to temperature fluctuations. After coating, the optical components have few surface defects, which can effectively reduce absorption and scattering during the light - handling process.