维易科 VEECO (2) Doors for Spector用途：专门为 Spector 溅射系统设计，便于操作人员进入工艺腔室，进行维护与工艺调整，从而高效优化溅射流程。在设备运行时，能确保出色的密封性，对提升薄膜质量与工艺稳定性起着关键作用。性能：结构设计合理，开合顺畅，方便快捷地接触到工艺腔内部，大大提高维护和调整效率。密封性能优异，运行时可有效隔绝外界环境干扰，保障腔室内稳定的压力、温度等工艺参数，利于形成高质量、均匀性佳的薄膜，减少因外界因素导致的薄膜缺陷，确保溅射工艺的稳定性与可靠性 。

Product Name: VEECO (2) Doors for SpectorPurpose: Specifically designed for the Spector sputtering system, it enables operators to access the process chamber for maintenance and process adjustments, thus efficiently optimizing the sputtering process. When the equipment is in operation, it can ensure excellent sealing performance, which plays a key role in improving film quality and process stability.Performance: It has a reasonable structural design, smooth opening and closing, allowing for quick and easy access to the interior of the process chamber, greatly improving maintenance and adjustment efficiency. The sealing performance is excellent. During operation, it can effectively isolate external environmental interference, ensuring stable process parameters such as pressure and temperature inside the chamber. This is conducive to the formation of high - quality and uniform films, reducing film defects caused by external factors and ensuring the stability and reliability of the sputtering process.