巴尔查斯 BALZERS BAK 500 真空镀膜设备用途:适用于光学、半导体及科研等领域。在光学方面,常用于镜片、滤光片等光学元件的增透、反射等功能性薄膜镀制;半导体领域可进行芯片制造相关的薄膜沉积;科研场景中助力超导、半导体等材料薄膜的研究与制备 。性能:配备电子束蒸发器,能够对金属或介质膜料进行蒸发操作。设备的镀膜室可营造良好真空环境,能将压力降低至10−5mbar 。基片安装架具备多种运动模式,以此实现均匀镀膜。通过石英晶体监控器和微处理器,可精准把控镀膜速率与厚度。镀膜时,基板可保持在 100°C ,有助于保障薄膜的附着力 。
Product Name: BALZERS BAK 500 Vacuum Coating EquipmentPurpose: It is suitable for the optical, semiconductor, and scientific research fields. In the optical aspect, it is often used for coating functional films such as anti-reflective and reflective films on optical components like lenses and optical filters. In the semiconductor field, it can be used for thin film deposition related to chip manufacturing. In scientific research scenarios, it helps with the research and preparation of material thin films such as superconducting and semiconductor thin films.Performance: It is equipped with an electron beam evaporator, which can evaporate metal or dielectric film materials. The coating chamber of the equipment can create a good vacuum environment and reduce the pressure to 10−5mbar. The substrate mounting frame has multiple motion modes to achieve uniform coating. Through a quartz crystal monitor and a microprocessor, the coating rate and thickness can be precisely controlled. During coating, the substrate can be maintained at 100°C, which helps ensure the adhesion of the thin film.