巴尔查斯 BALZERS BA 510 真空蒸发镀膜设备用途:适用于科研机构以及半导体、光学等行业。在科研中助力新型材料薄膜的实验与开发;半导体领域可用于芯片制造相关的薄膜沉积;光学方面可在镜片等元件上镀制功能性薄膜 。性能:部分设备采用 CTI 8F 车载低温泵及相应控制器,搭配 Varian 845 真空离子计、Inficon XYC 薄膜控制器等。具备金属钟罩提升装置,电源规格为 208V、三相、60Hz 。还有设备采用扩散泵(如 Balzers Diff 200)、Balzers Buffle BFA 200、带 R413a 的 Freon 压缩机 PW3K7、Pfeiffer 旋转泵 Duo 030a 等组成泵系统。配备 3 个热源、快门,直径 510mm。具备真空控制仪表,如 Balzers TPG 070 搭配 3 个 TPR 010 等 。
Product Name: BALZERS BA 510 Vacuum Evaporation Coating EquipmentPurpose: It is suitable for research institutions and industries such as semiconductors and optics. In scientific research, it helps with the experiment and development of new material thin films; in the semiconductor field, it can be used for thin film deposition related to chip manufacturing; in the optical aspect, it can coat functional thin films on components such as lenses.Performance: Some devices use a CTI 8F on - board cryopump and corresponding controller, with a Varian 845 vacuum ion gauge, Inficon XYC thin - film controller, etc. It has a metal bell jar hoist, and the power supply specifications are 208V, three - phase, 60Hz. There are also devices that use a pump system composed of a diffusion pump (such as Balzers Diff 200), Balzers Buffle BFA 200, a Freon compressor PW3K7 with R413a, a Pfeiffer rotary pump Duo 030a, etc. It is equipped with 3 thermal sources, shutters, and has a diameter of 510mm. It has vacuum control instruments, such as Balzers TPG 070 with 3 TPR 010, etc.