LEYBOLD A550 V7 在线溅射系统用途：用于沉积薄膜，如沉积氢化钇（YHx）薄膜。性能：腔体可抽至10−6mbar，沉积压力范围为2×10−3至1×10−2mbar，溅射直流功率 100 至 1000W，脉冲频率 70kHz，反向周期 4μs，可在玻璃（26mm x 76mm）和石英（Suprasil，10mm x 20mm）基板上沉积，膜厚范围 100nm 至 2.6μm。

Product Name: Leybold Optics A550V7 in-line sputtering systemPurpose: Used for depositing thin films, such as yttrium hydride (YHx) films.Performance: The chamber can be pumped down to 10−6 mbar. The deposition pressure ranges from 2×10−3 to 1×10−2 mbar. The DC power of the sputter varies from 100 to 1000 W, pulsed at a frequency of 70 kHz with a reverse cycle of 4 μs. Films can be deposited on glass (26 mm x 76 mm) and quartz (Suprasil, 10 mm x 20 mm) substrates, and the film thickness ranges from 100 nm to 2.6 μm.