DENTON VACUUM Integrity 14 热蒸发镀膜系统用途：适用于半导体、光学、科研等领域，可在多种基底材料上进行金属及合金薄膜的沉积，常用于芯片制造中的电极镀膜、光学镜片的功能性薄膜制备，以及材料研究中的薄膜工艺探索 。性能：具备不锈钢真空室，内部尺寸为长 13 英寸、直径 14.5 英寸、高 18 英寸。采用高速 CTI 8 低温泵，极限真空可抽至 < 5e -7mbar 。配备双源热蒸发器和 Inficon 晶体沉积速率监测仪。拥有可变速控制的单穹顶旋转基板支架。还可选择安装 2kVA 蒸发变压器以提升沉积功率，能够精确控制薄膜的沉积速率与厚度，保障薄膜均匀性 。

Product Name: DENTON VACUUM Integrity 14 Thermal Evaporation Coating SystemPurpose: It is suitable for fields such as semiconductors, optics, and scientific research. It can deposit metal and alloy thin films on a variety of substrate materials. It is often used for electrode coating in chip manufacturing, preparation of functional thin films for optical lenses, and exploration of thin - film processes in materials research.Performance: It has a stainless - steel vacuum chamber with internal dimensions of 13 inches in length, 14.5 inches in diameter, and 18 inches in height. It adopts a high - speed CTI 8 cryopump, and the ultimate vacuum can be pumped to <5e -7mbar. It is equipped with a dual - source thermal evaporator and an Inficon crystal deposition rate monitor. It has a single - dome rotating substrate holder with variable - speed control. A 2kVA evaporation transformer can also be optionally installed to increase the deposition power, which can precisely control the deposition rate and thickness of the thin film and ensure film uniformity.