巴尔查斯 BALZERS BAK 760 高真空镀膜机用途:广泛用于光学薄膜制作,可大量镀制精密的光学薄膜,适用于滤光片生产等。也用于科研机构进行材料薄膜沉积研究,如在半导体材料、金属与有机材料薄膜制备中发挥作用。性能:是计算机控制的高真空镀膜机,自动化程度高,镀膜重复性好。镀膜室工作直径 800 毫米,基片安装架能作不同行星运动,满足多样镀膜需求。有可控电子枪,使金属或介质膜料均匀蒸发。配备 CTI On - board 400 低温泵及 CTI 9600 压缩机(水冷)、Leybold Ruvac WSU 251 罗茨泵(无机械泵)。有 10kW 的石英加热装置、Balzers ESQ 212 电子枪及 EVH 215 电源、Balzers QMG 064 分压控制器、Inficon 762 - 500 - G2 石英晶体沉积控制器 。
Product Name: BALZERS BAK 760 High Vacuum Coating MachinePurpose: It is widely used in the production of optical thin films and can be used to coat a large number of precision optical thin films, which is suitable for the production of optical filters. It is also used by research institutions for the research of material thin film deposition, such as playing a role in the preparation of semiconductor materials, metal and organic material thin films.Performance: It is a computer - controlled high - vacuum coating machine with a high degree of automation and good coating repeatability. The working diameter of the coating chamber is 800 mm, and the substrate mounting frame can perform different planetary motions to meet various coating requirements. It has a controllable electron gun to evenly evaporate metal or dielectric film materials. It is equipped with a CTI On - board 400 cryopump and a CTI 9600 compressor (water - cooled), a Leybold Ruvac WSU 251 roots pump (without a mechanical pump). It also has a 10kW quartz heating device, a Balzers ESQ 212 electron gun and an EVH 215 power supply, a Balzers QMG 064 partial pressure controller, and an Inficon 762 - 500 - G2 quartz crystal deposition controller.