ANELVA L - 400EK - L 超高真空 L 型全金属阀门用途：适用于需要超高真空环境的设备，如半导体制造、科研实验中的超高真空系统。可用于控制气体流量与通路，保障系统的真空度与工艺稳定性 。性能：属于全金属制品，主体采用奥氏体不锈钢材质，轴密封使用奥氏体不锈钢制波纹管，为全焊接结构，真空暴露部位无油且清洁。阀门密封结构采用与 ICF 法兰类似、可靠性高的 capturing 密封结构 。能在 10^ - 8 Pa 以下的超高真空领域使用，具备出色的耐受加热性能，可进行高达 400℃或 450℃的烘烤除气 。

Product Name: ANELVA L - 400EK - L Ultra - High Vacuum Type - L All - Metal ValvePurpose: It is suitable for equipment that requires an ultra - high vacuum environment, such as ultra - high vacuum systems in semiconductor manufacturing and scientific research experiments. It can be used to control gas flow and passage, ensuring the vacuum degree and process stability of the system.Performance: It is an all - metal product. The main body is made of austenitic stainless steel, and the shaft seal uses an austenitic stainless steel bellows. It has an all - welded structure, and the parts exposed to vacuum are oil - free and clean. The valve sealing structure adopts a high - reliability capturing seal structure similar to that of ICF flanges. It can be used in the ultra - high vacuum range below 10^ - 8 Pa. It has excellent heat - resistant performance and can be baked out at up to 400°C or 450°C.