爱发科 ULVAC SMD - 1800用途:属于多腔室溅射系统,在高清显示行业应用广泛,主要用于金属膜、ITO、IGZO 及电介质膜等的成膜。同时,在半导体、光学等领域也发挥作用,可助力芯片制造中的金属布线、光学镜片的薄膜镀制等。性能:虽无公开的具体参数,但从爱发科技术实力来看,该设备应能高效营造高真空环境,保障薄膜沉积质量。抽气系统性能良好,可快速达到工艺所需真空度。具备精准的薄膜厚度控制能力,能精确调节镀膜速率,实现均匀的薄膜沉积,偏差极小。设备稳定性高,可长时间连续作业,减少生产中断,提高生产效率 。
Product Name: ULVAC SMD - 1800Purpose: It belongs to a multi - chamber sputtering system and is widely used in the high - definition display industry, mainly for the formation of metal films, ITO, IGZO, dielectric films, etc. Meanwhile, it also plays a role in semiconductor, optical and other fields, and can assist in metal wiring in chip manufacturing, thin - film coating of optical lenses, etc.Performance: Although there are no publicly available specific parameters, from the perspective of ULVAC's technical strength, this device should be able to efficiently create a high - vacuum environment to ensure the quality of thin - film deposition. The pumping system has good performance and can quickly reach the vacuum degree required by the process. It has precise thin - film thickness control capabilities, can accurately adjust the coating rate, achieve uniform thin - film deposition, and has a minimal deviation. The device has high stability and can operate continuously for a long time, reducing production interruptions and improving production efficiency.