爱发科 ULVAC SME - 200U用途：这是一款溅射系统，适用于研发及小规模生产场景。利用专门设计的溅射腔室，能在 8 英寸晶圆规模上，对介电材料进行高度均匀且稳定的沉积，广泛应用于微传感器、光学开关等 MEMS 产品生产。性能：具备独特且稳定的工艺，可在 500℃以下实现高性能 PZT 薄膜的大规模生产。采用 load - lock 型设计，减少外界环境对腔内的干扰。最多可配备三个工艺腔室，支持多种特定应用的工艺模块。拥有基板加热机制，可进行同时沉积与旋转沉积，能满足不同工艺需求，保障薄膜沉积的高质量与稳定性 。

Product Name: ULVAC SME - 200UPurpose: This is a sputtering system suitable for R&D and small - scale production scenarios. Using a specially designed sputtering chamber, it can perform highly uniform and stable deposition of dielectric materials on an 8 - inch wafer scale, and is widely used in the production of MEMS products such as microsensors and optical switches.Performance: It has a unique and stable process, which can achieve high - performance PZT thin - film mass production below 500℃. It adopts a load - lock type design to reduce the interference of the external environment on the chamber. Up to three process chambers can be equipped, and it supports a variety of application - specific process modules. It has a substrate heating mechanism and can perform simultaneous deposition and revolved deposition, which can meet different process requirements and ensure the high quality and stability of thin - film deposition.