爱发科 ULVAC SCH - 135用途：爱发科 ULVAC SCH - 135 是一款在多行业发挥重要作用的真空设备。在半导体产业，它为芯片制造中的薄膜沉积、刻蚀等工艺提供稳定真空环境；光学领域里，助力光学镜片镀膜等精密操作；平板显示行业中，保障显示屏制造流程里的真空处理环节顺利进行。同时，也适用于电子部件制造等对真空度要求较高的场景 。性能：作为直结型小型油回转真空泵（化学类型），其接气部表面经过特殊处理，具备良好的耐腐蚀性。排气速度在 50Hz 时为 135L/min，60Hz 时达 162L/min 。能达到的极限压力为 0.67Pa（g.v.closed） ，在处理特殊气体和溶剂方面表现出色，适用于化学工业、半导体制造等领域。设备内置热保护器，使用温度范围在 7℃至 40℃ ，消费电力为 400W 。

Product Name: ULVAC SCH - 135Purpose: The ULVAC SCH - 135 is a vacuum device that plays a significant role in multiple industries. In the semiconductor industry, it provides a stable vacuum environment for processes such as thin - film deposition and etching in chip manufacturing. In the optical field, it facilitates precise operations such as optical lens coating. In the flat - panel display industry, it ensures the smooth progress of the vacuum treatment in the manufacturing process of display screens. It is also suitable for scenarios with high requirements for vacuum degree, such as electronic component manufacturing.Performance: As a direct - drive small oil - rotary vacuum pump (chemical type), its gas - contact part has a specially treated surface, showing good corrosion resistance. The pumping speed is 135 L/min at 50Hz and 162 L/min at 60Hz. The ultimate pressure it can reach is 0.67 Pa (g.v.closed). It performs well in handling special gases and solvents and is suitable for the chemical industry, semiconductor manufacturing, and other fields. The device has a built - in thermal protector, and its operating temperature range is from 7℃ to 40℃, with a power consumption of 400W.