爱发科 ULVAC SIV - 500 备用零件用途：专为 ULVAC SIV - 500 溅射系统而设计，用于系统日常维护、故障修复以及性能升级，确保 SIV - 500 溅射系统持续稳定运行，满足光学薄膜、半导体等相关行业生产需求。性能：涵盖多种零件，如真空规管（如 ULVAC SW - 1 皮拉尼真空计等），可精确测量系统真空度，测量范围广，能满足不同阶段的真空监测需求；各类阀门（如 SMC XLG - 50 - M9NA - X62 通气阀等），具有良好的密封性与开关稳定性，可有效控制气体流量与流向；还有承载传输机构零件，保障晶圆等基底材料在系统内稳定、精准地传输，保证溅射工艺的准确性与一致性 。

Product Name: ULVAC Spare parts for SIV - 500Purpose: Specifically designed for the ULVAC SIV - 500 sputtering system, it is used for the system's daily maintenance, fault repair, and performance upgrade, ensuring the continuous and stable operation of the SIV - 500 sputtering system to meet the production needs of related industries such as optical thin films and semiconductors.Performance: It covers a variety of parts. For example, vacuum gauges (such as ULVAC SW - 1 Pirani vacuum gauge, etc.) can accurately measure the vacuum degree of the system with a wide measurement range to meet the vacuum monitoring requirements at different stages. Various valves (such as SMC XLG - 50 - M9NA - X62 vent valve, etc.) have good sealing performance and switch stability, which can effectively control the gas flow rate and direction. There are also parts of the carrier transfer mechanism to ensure the stable and accurate transfer of wafers and other substrate materials in the system, guaranteeing the accuracy and consistency of the sputtering process.